在线加热器
  • TIH

    TIH

    The TIH offers unmatched performance and reliability with the ability to heat a variety of chemicals. This heater is suitable for either single pass or recirculating applications. Delivers best-in-class performance over a wide range of flow and temperature requirements. The TIH is the most durable and long-lasting inline chemical heater available!

    TIH
  • SHX

    SHX

    The SHX portfolio of in-line, ultra-high purity heaters is designed to safely heat IPA and low flash-point solvents, meeting the most stringent cleanliness requirements to support next-generation semiconductor node technologies. Suitable for recirculating and single-pass flow requirements, these compact, low-mass heaters deliver fast heat-up with quick responsiveness to flow changes. SHX is the ULTIMATE in ultra-high purity solvent heating! Explosion proof (EX) versions available.

    SHX
  • SHBSHC Inline Chemical Solvent Heater

    SHBSHC Inline Chemical Solvent Heater

    The SHB/SHC, a low wattage inline chemical/solvent heater, delivers superior indirect heating with temperature stability. Using multiple temperature sensors and self-limiting technology, this heater ensures safe operation during low or no-flow conditions.

    SHBSHC Inline Chemical Solvent Heater
  • Nexus

    Nexus

    Engineered for your process - manage multiple chambers with one heater! Building off of the popular SHC product line, the Nexus incorporates the same safe indirect heating technology to heat multiple process loops. Using a single heat source, the Nexus improves chamber-temperature matching performance for advanced processing requirements.

    Nexus
  • Lufran® Chemical Heater

    Lufran® Chemical Heater

    Featuring the fusion of two successful products, the Lufran Chemical Series offers the safe heating capabilities of Frontier (inline chemical heater) in a complete turn-key heating system. With stainless steel wetted materials this heater is suitable for either single pass or recirculating applications for heating a variety of chemicals. Offers outstanding performance over a wide range of flow and temperature requirements. A complete high wattage turn-key heating solution.

    Lufran® Chemical Heater
  • Inline Gas Heater

    Inline Gas Heater

    Improves product times in drying applications used in wafer processing, solvent drying and surface finishing. Delivers superior temperature stability with changes in flow.

    Inline Gas Heater
  • HCQ

    HCQ

    The HCQ Quartz Inline Heater provides a minimal footprint, space-conscious design combined with ultrapure, high-purity100% quartz construction. The Isolated heating element virtually eliminates process contamination while multiple plumbing configurations ensure ease of operation.

    HCQ
  • Frontier

    Frontier

    Frontier is designed for heating chemicals and solvents in hazardous operating environments. Suitable for heating a wide variety of flammable and non-flammable chemistries using electropolished stainless steel wetted materials for improved cleanliness. Offers outstanding performance over a wide range of flow and temperature requirements. Available up to 36kW, the Frontier is the most powerful inline solvent heater available.

    Frontier
  • Chemheat

    Chemheat

    Best-in-class heating for wet-process chemistries. Designed to support advanced Ultra HighPurity (UHP) requirements.ChemHeat flow path utilizes all fluoropolymer wetted materials, an o-ringless sealing design, and the capability to detect any breach in the fluid path. Suitable for all non-flammable chemistries in either single pass or recirculating flow applications.

    Chemheat